The OLS5000 microscope’s advanced technology enables it to capture high-resolution measurements of 3D samples.
The microscope’s scanning algorithm delivers improved data quality and improved speed to reduce scan time and streamline your workflow, resulting in improved productivity.
The OLS5000 microscope features automatic data capture so difficult setting adjustments are no longer necessary. Even users with minimal training can still obtain accurate results.
The low-output, non-contact, nondestructive laser means no sample preparation is required. Delicate materials can be measured without being damaged. The extension frame accommodates samples with a height of up to 210 mm, while the ultra-long working distance objective facilitates measurement of concavities as deep as 25 mm. In both cases, all you have to do is place the sample on the stage.
Model | OLS5000-SAF | OLS5000-SMF | OLS5000-LAF | OLS5000-EAF | OLS5000-EMF | |
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Total magnification | 54x - 17,280x | |||||
Field of view | 16 μm - 5,120 μm | |||||
Measurement principle | optical system | Reflection-type confocal laser scanning laser microscope Reflection-type confocal laser scanning laser-DIC microscope Color Color-DIC |
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Light receiving element | Laser: Photomultiplier (2ch) Color: CMOS color camera |
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Height measurement | Display resolution | 0.5 nm | ||||
Dynamic range | 16 bits | |||||
Repeatability | 20x : 0.03 μm, 50x : 0.012 μm, 100x : 0.012 μm | |||||
Accuracy | Measurement value +/- 1.5% | |||||
Accuracy for stitched image | 20x : 15+0.5L μm, 50x : 9+0.5L μm, 100x : 7+0.5L μm (L: Stitching length [μm]) | |||||
Measurement noise (Sq noise) | 1 nm | |||||
Width measurement | Display resolution | 1 nm | ||||
Repeatability | 20x : 0.05 μm, 50x : 0.04 μm, 100x : 0.02 μm | |||||
Accuracy | Measurement value +/- 1.5% | |||||
Accuracy for stitched image | 20x : 15+0.5L μm, 50x : 9+0.5L μm, 100x : 7+0.5L μm (L: Stitching length [μm]) | |||||
Maximum number of measuring points in a single measurement |
4096 x 4096 pix | |||||
Maximum number of measuring points | 36 Mpix | |||||
XY stage configuration | Length measurement module | • | NA | NA | • | NA |
Operating range | 100 x 100 mm Motorized |
100 x 100 mm Manual |
300 x 300 mm Motorized |
100 x 100 mm Motorized |
100 x 100 mm Manual |
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Maximum sample height | 100 mm | 30 mm | 37 mm | 210 mm | 140 mm | |
Laser light source | Wavelength | 405 nm | ||||
Maximum output | 0.95 mW | |||||
Laser class | Class 2 (IEC60825-1:2007, IEC60825-1:2014) | |||||
Color light source | White LED | |||||
Electrical power | 240 W | 240 W | 278 W | 240 W | 240 W | |
Mass | Microscope body | Approx. 31 kg | Approx. 32 kg | Approx. 50 kg | Approx. 43 kg | Approx. 44 kg |
Control box | Approx. 12 kg |