The slurry used in the Fine Polishing step by mixing cooling lubricating components with fine diamond particles has an excellent effect on pushing and fine surface treatment which may be caused by a sample material or work friction in a general disk paper.
Diamond abrasive agents such as Fine-DT, DO, DH, and DQ should be applied by matching them appropriately with the Polishing Pad according to the results of Fine Polishing pretreatment or the material, composition, and purpose of observation of the sample.